Spareparts
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- Chuck & Pedestal
0015-01666-002 [AMAT]
0015-01666-002 [AMAT] 0015-01666-002 [AMAT].jpg)
716-026652-911 [LAM]
716-026652-911 716-026652-911716-026652-732 [LAM]
716-026652-732 ERAMIC BOTTOM RING EDGE.jpg)
715-800328-002D ESC Housing Bottom Plate [LAM]
715-800328-002D ESC Housing Bo.jpg)
716-003481-002-A Ceramic Plate 505mm [LAM]
716-003481-002-A Ceramic Plate.jpg)
16-132590-00N Rev E SHWRHD Pinned 300mm [Novellus]_Sold out
16-132590-00N Rev E SHWRHD Pin 16-132590-00N Rev E SHWRHD Pin.jpg)
02-292391-00 Pedestal 300mm [Novellus]
02-292391-00 Pedestal 300mm 02-292391-00 Pedestal 300mm